Application specific solutions engineered to meet unique design challenges. In collaboration with end-users, Asahi can integrate any combination of Dymatrix components onto a single hybrid valve body. These multi-function valves provide a compact solution, eliminating multiple connections and possible leak points.
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Data Sheet
Ideal Applications Include:
(CMP, Electrochemical Deposition – ECD, Photolithography, Chemical Delivery Systems, Spin Coating, Wet Bench Cleaning)
Specifications
- Materials of Construction: Wetted Valve Body (PTFE), Actuators (PFA or PVDF)
- Flow Rate: Various
- Flow Configuration: Various
- Actuation: Manual, Pneumatic, Hybrid (Multi-turn Push-to-lock)
- Connection Types: Flare, S300, Super Pillar, Tube, Rc, Flowell 20 and 60 series
Features/Benefits
Options
Resources
Features/Benefits
- Compact Monolithic Design
- Eliminate dead legs
- Ultra-high purity, corrosion resistant PTFE and PFA wetted components
- Full customized to application specific needs
- Reduced connections and possible leak points
- Lower installation costs
Options
- Configurable mounting orientation
- O-Rings: FKM, EPDM, Viflon F, Kalrez®
- Fluoropolymer coated SS hardware
Resources